1.3 Micro-optical component processing methods Due to the application requirements, research on micro-optical component processing technology is also deepening, and various modern processing technologies such as electron beam writing technology, laser beam writing technology, photolithography technology, etching have emerged. Technology, LIGA technology, replication technology and coating technology, among which the most mature technologies are etching technology and LIGA technology. These technologies are basically developed from the micro-machining technology of microelectronic components, but unlike electronic components, three-dimensional molding accuracy and assembly accuracy are critical to optical components and will directly affect their performance, so these Each method has its own flaws and limitations of use. For example, due to the limitation of the depth of field of view, lithography is limited to the processing of two-microstructures and small aspect ratio three-dimensional structures. Sacrificial layer etching technology can achieve quasi-three-dimensional processing, but it is easy to cause internal stress and affect the final Mechanical performance, and equipment cost is very expensive; the high-collimation X-ray source used by LIGA technology is generally obtained by synchrotron radiation accelerator, and the cost is much higher than that of lithography equipment. It is difficult for general laboratories and enterprises to bear. Electron beam writing technology can process nano-scale precision structures, but it is inefficient and difficult to mass produce. Reproduction techniques, including thermoforming, compression molding, and injection molding, are low-cost technologies suitable for mass production, but require high precision and durability.

Another method of processing micro-optical components is ultra-precision machining. Recently, "Fortune" magazine has the following sentence: "Ultra-precision machining technology acts on optical components as if the integrated circuit had an effect on electronic components." Although this sentence is not exaggerated, it shows that the processing of micro-optical components with ultra-precision machining technology has attracted great attention. The application of ultra-precision machining technology in the processing of micro-optical components will be discussed in detail in the next section.

2 Application of ultra-precision machining technology in the processing of micro-optical components

Ultra-precision machining techniques use tools to change the shape of a material or to destroy the surface of a material to achieve the desired shape in a cut form. Such as single crystal diamond turning and milling, grinding, fast cutting and mechanical polishing. This section focuses on ultra-precision machining techniques for machining optical components and their molds.

2.1 The development of key technologies for ultra-precision machine tools Computer-aided design technology, especially the development of finite element analysis technology, provides a convenient means for the overall structural optimization design of ultra-precision machine tools, which makes the rigidity and stability of machine tools continuously improve. At present, the typical structure of a single crystal diamond lathe has a "T" type layout structure, the main shaft is generally mounted on the X-direction rail, and the cutter is mounted on the Z-direction rail. In the past ten years, with the rapid development of computer technology, some key technologies of ultra-precision machine tools, such as control technology, feedback system, servo drive, etc., have made great progress, improving the machining accuracy of ultra-precision machine tools. At present, ultra-precision has been able to directly process surfaces with a roughness of 1 nm. The development of these key technologies is summarized as follows: the use of natural granite as the machine bed, which has very high thermal stability and mechanical stability; the use of air Spring system for vibration isolation; the use of liquid or gas static pressure rails, so that Increased damping, smooth motion, no friction; DC linear motor fast drive system, with good dynamic stiffness; high-speed air spindle, high load capacity, high stiffness, can improve machining accuracy; open computer numerical control technology (CNC), easy Application of third-party control software to improve machining accuracy; high-resolution detection device can provide accurate position feedback; use of fast servo mechanism to realize multi-axis system macro-micro-combination technology for processing complex profiles; online measurement and error compensation Technology, correctly measuring workpiece residual errors and ultimately eliminating errors.

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